Micromechanical sensor element for capacitive pressure detection
US8220337B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 1, 2011 |
| Grant date | Jul 17, 2012 |
| Priority date | — |
| Expiry date | Feb 1, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical capacitive pressure sensor has a layered structure, which includes at least one deflectable carrier element for at least one deflectable measuring electrode in a first layer plane and at least one stationary carrier structure for at least one counter electrode in a second layer plane parallel to the first layer plane. The carrier structure is suspended in a closed cavity of the layered structure between two diaphragms, which are oriented essentially perpendicularly to the layer planes and delimit the cavity on two opposite sides. At least one pressure connection aperture is provided, via which at least one of the two diaphragms may be subjected to a pressure being measured. The carrier element is connected to the two diaphragms in such a way that diaphragm deformations cause a parallel shift of the measuring electrode relative to the counter electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.