Radial turbomolecular pump with electrostatically levitated rotor
US8221098B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2009 |
| Grant date | Jul 17, 2012 |
| Priority date | — |
| Expiry date | Nov 12, 2030 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/058
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A radial turbomolecular pump comprising an electrostatically levitated rotor with a high compression ratio and pump speed at a chip-scale level. The levitated rotor can be sandwiched between a stator plate and a driver and multiple concentric rings of microblades can be fabricated on the rotor plate and the stator plate. The center portions of the driver and the base plate include concentric ring electrodes for rotor levitation by electrostatic forces. The space between two concentric rings of microblades forms a groove that is wide enough to receive the microblades from the opposing disk. The stator disk can be fixed and the rotor disk spins such that the rotor microblades move tangentially relative to the stator microblades. The microblades can be tilted at an angle from the tangent, facilitating momentum transfer to gas molecules in the radial direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.