Patent · US Active

Method for the production of a ceramic substrate, and a ceramic substrate

US8222171B2 · kind B2 · utility

0Cited by

1References

14Claims

0Family size

Assignee

SCHUNK KOHLENSTOFFTECHNIK GMBH · DE

Inventors

Marco Ebert · Lahntal, DE
Martin Henrich · Wetzlar, DE
Andreas Lauer · Kirchhain, DE
Gotthard Nauditt · Harthausen auf der Scher, DE
Thorsten Scheibel · Bad Nauheim, DE
Roland Weiss · Iserlohn, DE

Key dates

Filing date	Jul 13, 2007
Grant date	Jul 17, 2012
Priority date	—
Expiry date	Nov 22, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/30
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

A method for the production of a ceramic substrate for a semiconductor component, includes the steps of producing paper containing at least cellulose fibers, as well as a filler to be carbonized and/or SiC, pyrolizing the produced paper, and siliconizing the pyrolyzed paper.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.