Charged particle detection system and method
US8222600B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 2010 |
| Grant date | Jul 17, 2012 |
| Priority date | — |
| Expiry date | Oct 14, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24485
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system for selectively detecting charged particles produced due to operation of a charged particle beam column irradiating a specimen, including a proximal grid being selectively electrically biasable and configured for controllably directing the charged particles by electrically focusing the charged particles to compel selected secondary charged particles, whereupon being selected from the charged particles, to be attracted thereto, and to repel unselected secondary charged particles therefrom, a distal grid spaced apart from the proximal grid and separated therefrom by a gap and being selectively electrically biasable and configured for attracting the selected secondary and/or tertiary charged particles, whereupon being selected from the charged particles, to the distal grid, and to repel unselected tertiary charged particles therefrom, and a charged particle detector configured for detecting selected secondary charged particles attracted to the proximal and/or distal grid and detecting selected tertiary charged particles attracted to the distal grid, that impinge thereupon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.