Method for processing output of scanning type probe microscope, and scanning type probe microscope
US8225418B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 7, 2009 |
| Grant date | Jul 17, 2012 |
| Priority date | — |
| Expiry date | Dec 7, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Incident light 19 emitted from a laser light source 18 is reflected on an upper surface of a cantilever 13, so that reflected light 19a enters light detection means 20. Since the incident light 19 and the reflected light 19a are in a plane not including a long axis of the cantilever 13, movements of the reflected light 19a due to change in a deflection amount θ of the cantilever 13 and due to change in a fine vertical movement amount z thereof are different in direction on the light detection means 20. This enables the change in the deflection amount θ of the cantilever 13 and the change in the fine vertical movement amount z thereof to be separated from output of the light detection means 20.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.