Electron beam irradiating apparatus with monitoring device
US8227776B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 2009 |
| Grant date | Jul 24, 2012 |
| Priority date | — |
| Expiry date | Jun 11, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K5/10
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The electron beam irradiating apparatus with the monitoring device has an electron beam irradiating means for irradiating materials in an irradiation chamber. The monitoring device has a photographing means for imaging a lights emitted by irradiating an electron beam to the materials; a storage means that stores state of electron beam irradiation in advance; and a calculating means that processes an image, which is captured by the photographing means, to decide a state of electron beam irradiation. The storage means has stored at least three state of electron beam irradiation and also has stored image luminance associated with those states of electron beam irradiation. The calculating means loads the image, which is captured by the photographing means, to compare the loaded image with the image luminance stored in the storage means, thereby deciding a state of electron beam irradiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.