Inverted microscope for high-contrast imaging

US8228600B2 · kind B2 · utility

Assignee

• LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

• Peter Euteneuer · Biebertal, DE
• Ralf Krueger · Rockenberg, DE

Key dates

• Filing date: May 26, 2006
• Grant date: Jul 24, 2012
• Expiry date: Jan 22, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/14
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An inverted microscope for the high-contrast imaging of objects includes multiple objectives configured to be disposable in an imaging beam path. Each objective has a respective objective pupil associated therewith. A lens system is also provided for generating respective intermediate images of the respective objective pupils. A modulator disposing device, which includes a plurality of modulators, is configured to dispose the modulators at predetermined respective locations on an optical axis corresponding to the locations of the respective intermediate images of the respective objective pupils so as to contrast an object image.