Functionalized monolayers for carbon dioxide detection by a resonant nanosensor
US8230720B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 16, 2010 |
| Grant date | Jul 31, 2012 |
| Priority date | — |
| Expiry date | Dec 15, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2610/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resonant nanosensor apparatus associated with a functionalized monolayer for detecting carbon dioxide and a method of forming the same. A wafer including a sensing vibrating beam and a reference vibrating beam may be functionalized with a functional group in order to form a sensing self monolayer. The sensing self assembled monolayer may be configured by bridging oxygen or carbon atoms covalently bonded with respect to the vibrating beams. A liquid solution of hydrochloric acid may then be applied to the sensing self assembled monolayer at the surface of the reference beam by a direct printing process to obtain a reference monolayer. The liquid solution of HCl transforms the functional groups responsible for the carbon dioxide detection into protonated groups, which do not react with carbon dioxide, but possess visco-elastic properties similar to that of the sensing monolayer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.