Method and apparatus for simultaneous lateral and vertical patterning of molecular organic films
US8232136B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 7, 2009 |
| Grant date | Jul 31, 2012 |
| Priority date | — |
| Expiry date | Oct 19, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/631
Abstract
The disclosure relates to a method and apparatus for micro-patterning organic layers of OLEDs. The disclosed methods do not require applying pressure to the film, nor do they require heat treatment, surface treatment or fast release rate of a stamp from the substrate. The disclosed methods are particularly advantageous over the conventional shadow masking techniques for providing large array fabrication with small features. In one embodiment of the disclosure, one or more organic films are selected for the OLED as a function of their individual or combined sublimation temperature. The material is selected in view of the depth and shape of the features that are to be formed in the organic layer. The disclosed embodiments can provide minimum feature size of 13 μm which is suitable for high resolution OLED displays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.