Device and method for characterizing surfaces
US8232518B2 · kind B2 · utility
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Key dates
| Filing date | Jul 5, 2007 |
| Grant date | Jul 31, 2012 |
| Priority date | — |
| Expiry date | Mar 27, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/207
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of characterizing surfaces comprises the steps of: the properties of said beam (2) being selected in such a manner that at least some of said neutral atoms or molecules that are diffused forwards are diffractive by said surface for characterizing.A device for implementing such a method comprises means (1) for generating such a beam (2) of neutral atoms or molecules and position-sensitive detector means (4) for detecting the neutral atoms or molecules that are diffused forwards by said surface (3) for characterizing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.