Corrosion barrier layer for photoconductive X-ray imagers
US8232531B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 29, 2007 |
| Grant date | Jul 31, 2012 |
| Priority date | — |
| Expiry date | Jun 30, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
Improved corrosion resistance for direct X-ray imaging detectors is obtained by providing a pixelated, electrically conductive barrier layer between the X-ray sensitive material and the pixel electrodes. Each barrier layer can cover part or all of its corresponding pixel electrode. In cases where pixel electrodes makes contact to underlying circuitry through vertical vias, it is preferred for the barrier layers to cover the via sections of the pixel electrodes. The barrier layers for each pixel electrode can be spaced apart from each other, or they can all be included within a continuous film on top of the pixel electrodes. Such a continuous film can be pixelated by spatially modulating its properties (e.g., thickness, doping) to significantly reduce lateral conductivity from pixel to pixel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.