Patent · US Active

Pressure sensor with a closed cavity containing an inert filling medium

US8234926B2 · kind B2 · utility

7Cited by

21References

18Claims

0Family size

Assignee

EPCOS AG · DE

Inventors

Christian Wohlgemuth · Berlin, DE
Peter Thiele · Stocken, DE

Key dates

Filing date	Oct 14, 2010
Grant date	Aug 7, 2012
Priority date	—
Expiry date	Oct 23, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/10253
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor has a substrate with conductor tracks for contact-connecting electrical components. The pressure sensor has a measuring element for converting a mechanical measurement variable into an electrical signal and a signal converter for processing the electrical signals from the measuring element further. Furthermore, the pressure sensor has a first diaphragm which, together with the substrate, forms a first closed cavity which contains an inert filling medium. At least one side of the measuring element of the pressure sensor, which comprises an active surface, has direct contact with the filling medium in the first cavity. The signal converter is arranged on the substrate in the form of an unhoused integrated circuit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.