Differential pressure sensor with line pressure measurement
US8234927B2 · kind B2 · utility
11Cited by
88References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 8, 2010 |
| Grant date | Aug 7, 2012 |
| Priority date | — |
| Expiry date | Aug 11, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L15/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein and first and second openings to the cavity configured to apply first and second pressures. A diaphragm in the cavity separates the first opening from the second opening and is configured to deflect in response to a differential pressure between the first pressure and the second pressure. A capacitance based deformation sensor is provided and configured to sense deformation of the sensor body in response to a line pressure applied to the sensor body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.