Method and system for setting rates and targets in a range management system
US8239053B2 · kind B2 · utility
0Cited by
13References
2Claims
0Family size
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Key dates
| Filing date | Jun 26, 2009 |
| Grant date | Aug 7, 2012 |
| Priority date | — |
| Expiry date | Mar 24, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67276
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus includes determining a number of planned starts of a product during a predetermined time period for future processing, averaging the number of planned starts for the predetermined time period, and setting a production rate for a first range based on the average number of planned starts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.