Robust radiation detector comprising diamond
US8242455B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2007 |
| Grant date | Aug 14, 2012 |
| Priority date | — |
| Expiry date | Apr 20, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/26
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
A radiation detector comprises a substrate of diamond material and at least one electrode formed at a surface of the substrate. The electrode comprises electrically conductive material deposited in a cavity in the surface of the substrate so that at least a portion of the material of the electrode is below the surface of the substrate. The cavity will typically be an elongate trench or channel in which electrically conductive material such as boron-doped diamond is deposited. In some embodiments, at least two electrodes are located adjacent to one another at the surface of the substrate. In other embodiments, the device has a plurality of electrodes, at least one of which is located at a first surface and at least one of which is located at an opposed second surface of the substrate. In the latter case, an electrode at one surface of the substrate can be connected to an electrode at the opposed surface of the substrate by means of a conductive via, which consists of a through-hole filled or coated with conductive material. Typically, the electrodes are arranged in an interdigitated configuration, each electrode having a plurality of elongate electrode elements. Each such electrode …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.