Area-variable type capacitive displacement sensor having mechanical guide
US8242791B2 · kind B2 · utility
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Key dates
| Filing date | May 20, 2009 |
| Grant date | Aug 14, 2012 |
| Priority date | — |
| Expiry date | Mar 3, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D18/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An area-variable type capacitive displacement sensor includes: a stationary element; a movable element; an elastic member for providing a force biasing one of the stationary element and the movable member towards a remaining one thereof in a direction perpendicular to a driving direction so that the stationary element and the movable member are maintained in close contact with each other; a power supply; and a signal detecting circuit. The sensor further includes a guide means for correcting an initial alignment error and reducing an operation alignment error between the stationary element and the movable element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.