Micromachined electrothermal rotary actuator
US8243397B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2007 |
| Grant date | Aug 14, 2012 |
| Priority date | — |
| Expiry date | Mar 21, 2031 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05B2250/82
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present disclosure is directed to a micromachined rotary actuator constructed of a central portion and an outer portion at least partially surrounding the central portion and separated from the central portion by an in-plane gap. A plurality of arms are each connected at one end to the central portion and at another end to the outer portion so as to span the in-plane gap. The arms are constructed of a plurality of horizontally stacked materials positioned to enable the arms to bend in-plane when heated. Conductors are positioned within the actuator for heating the arms. Because of the rules governing abstracts, this abstract should not be used to construe the claims.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.