Plasma insensitive height sensing
US8244494B2 · kind B2 · utility
1Cited by
11References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 6, 2007 |
| Grant date | Aug 14, 2012 |
| Priority date | — |
| Expiry date | Apr 6, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, a first signal at a first frequency, and measuring, at the first or second piece, a second signal at a second frequency. The second frequency is different from the first frequency. The distance is determined based on the measured first and second signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.