Production of cavities that can be filled with a fluid material in an optical microtechnological component
US8246184B2 · kind B2 · utility
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10References
8Claims
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Key dates
| Filing date | Feb 6, 2007 |
| Grant date | Aug 21, 2012 |
| Priority date | — |
| Expiry date | Aug 17, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02C2202/18
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A novel method makes it possible to form cavities intended to contain a liquid with determined optical properties within a film for optical use. The walls (38) of the cavities (40) are formed by plasma etching of a layer of transparent or light absorbent material (30, 34) transferred onto a microtechnological substrate, the walls (38) having a structured profile in order to limit the parasitic phenomena of light diffusion and diffraction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.