Patent · US Active

Processing of chlorosilane flows containing boron

US8246925B2 · kind B2 · utility

9Cited by
24References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 22, 2008
Grant dateAug 21, 2012
Priority date
Expiry dateOct 21, 2028

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC01B33/10778
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

The invention relates to a method for yielding boron-depleted chlorosilanes from a chlorosilane mixture containing boron by means of separation by distillation of a boron-enriched distillation flow. The invention further relate to a device for yielding boron-depleted chlorosilanes from a chlorosilane mixture containing boron.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.