Processing of chlorosilane flows containing boron
US8246925B2 · kind B2 · utility
9Cited by
24References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2008 |
| Grant date | Aug 21, 2012 |
| Priority date | — |
| Expiry date | Oct 21, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/10778
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The invention relates to a method for yielding boron-depleted chlorosilanes from a chlorosilane mixture containing boron by means of separation by distillation of a boron-enriched distillation flow. The invention further relate to a device for yielding boron-depleted chlorosilanes from a chlorosilane mixture containing boron.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.