Device for detection and/or emission of electromagnetic radiation and method for fabricating such a device
US8247771B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 10, 2010 |
| Grant date | Aug 21, 2012 |
| Priority date | — |
| Expiry date | Feb 25, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/045
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The device for detection and/or emission of radiation has an encapsulation micropackage in a vacuum or under reduced pressure that comprises a cap and a substrate delineating a sealed housing. The housing encapsulates at least one uncooled thermal detector and/or emitter having a membrane sensitive to electromagnetic radiation suspended above the substrate, a reflector and at least one getter. The getter is arranged on at least a part of a second main surface of the reflector to form a reflector/getter assembly. A free space, releasing an accessible surface of the getter and in communication with the housing, is also formed between the reflector/getter assembly and the front surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.