Optoelectronic detector assembly and method of operating same

US8253093B2 · kind B2 · utility

Assignee

• Carl Zeiss Micromanaging GmbH · DE

Inventors

• Mirko Liedtke · Jena, DE
• Matthias John · Nuremberg, DE

Key dates

• Filing date: Aug 4, 2010
• Grant date: Aug 28, 2012
• Expiry date: Aug 15, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/28
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optoelectronic detector and method of using same. In order to avoid any condensation on a surface, it has been known to heat such a surface. However, heating an optoelectronic detector will create a stronger hissing noise due to the greater dark current that is caused thereby. The invention is intended to avoid any condensation on an optoelectronic detector without airtight encapsulation. To this end, the detector is cooled and equipped with a sensor for the determination of a current value of one of the variables ambient humidity and ambient dew point temperature and a control unit that is connected with the sensor and designed to control the cooling device in dependence of such a value. By taking into account the ambient humidity or, respectively, the dew point temperature in the control of the cooling device, condensation on the detector can be avoided. An airtight encapsulation of the detector and the cooling device is not required.