Method for the production of a component, and component

US8258590B2 · kind B2 · utility

Assignee

• NORTHROP GRUMMAN LITEF GMBH · DE

Inventors

• Wolfram Geiger · Gomaringen, DE
• Uwe Breng · Gundelfingen, DE

Key dates

• Filing date: Mar 28, 2008
• Grant date: Sep 4, 2012
• Expiry date: Dec 21, 2028

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/0118
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method for producing a component, especially a micromechanical, micro-electro-mechanical or micro-opto-electro-mechanical component, as well as such a component which has an active structure that is embedded in a layer structure. Strip conductor bridges are formed by etching first and second depressions having a first and second, different etching depth into a covering layer of a first layer combination that additionally encompasses a substrate and an insulation layer. The deeper depression is used for insulating the strip conductor bridge while the shallower depression provides a moving space for the active structure with the moving space being bridged by the strip conductor bridge.