Micro-electro-mechanical systems (MEMS) device
US8258591B2 · kind B2 · utility
10Cited by
10References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2008 |
| Grant date | Sep 4, 2012 |
| Priority date | — |
| Expiry date | Jul 7, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0735
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention provides a MEMS device, be implemented on many MEMS device, such as MEMS microphone, MEMS speaker, MEMS accelerometer, MEMS gyroscope. The MEMS device includes a substrate. A dielectric structural layer is disposed over the substrate, wherein the dielectric structural layer has an opening to expose the substrate. A diaphragm layer is disposed over the dielectric structural layer, wherein the diaphragm layer covers the opening of the dielectric structural layer to form a chamber. A conductive electrode structure is adapted in the diaphragm layer and the substrate to store nonvolatile charges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.