Nano-electro-mechanical systems switches
US8258899B2 · kind B2 · utility
10Cited by
7References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2007 |
| Grant date | Sep 4, 2012 |
| Priority date | — |
| Expiry date | Nov 14, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2057/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
NEMS (Nano-Electro-Mechanical Systems) apparatuses are described. By applying a static electric field, an arm or beam in a NEMS apparatus is made to bend so that one electrical conductor is made to contact another electrical conductor, thereby closing the NEMS apparatus. Some apparatus embodiments make use of electrostatic coupling to cause the arm or beam to bend, and some apparatus embodiments make use of piezoelectric materials to cause the arm or beam to bend. Other embodiments are described and claimed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.