Interferometer actuator
US8259300B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 21, 2008 |
| Grant date | Sep 4, 2012 |
| Priority date | — |
| Expiry date | Mar 1, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2047
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates the movement of at least one movable means of an interferometer relative to the body of the interferometer. The system according to the invention, comprises at least two interferometer actuators, that can be operated individually, so that the at least two actuators are capable of moving the at least one movable means of the interferometer. When activating at least one of the at least two interferometer actuators the at least one movable means of the interferometer is moved with a minimum need for correcting for e.g. tilt. In a preferred configuration the system and the method according to the invention comprises three interferometer actuators that can be operated individually.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.