Systems and methods for measuring surface shape
US8260024B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2012 |
| Grant date | Sep 4, 2012 |
| Priority date | — |
| Expiry date | Jan 23, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/0264
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for determining a surface shape of a test object includes a pattern having a plurality of first elements dispose about a central axis and defining an aperture containing the central axis. The first elements includes a plurality of common elements having a common form and a reference element having a reference form that is different than the common form. The system further comprises a detector array and an optical system. The optical system is adapted to provide an image of the first elements when light reflects off a surface of a test object, passes through the aperture, and is received by the detector array. The reference form may be configured to facilitate an association between the common elements and the spot images of the common elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.