Methods of producing damascene main pole for perpendicular magnetic recording head
US8262918B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2009 |
| Grant date | Sep 11, 2012 |
| Priority date | — |
| Expiry date | Aug 28, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/3163
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Methods of producing magnetic recording heads are disclosed. The methods can include providing a wafer comprising a substrate layer in which are disposed a plurality of damascene trenches. The method can further include depositing a pole material across the whole wafer, wherein the plurality of trenches are filled with the pole material. The methods can further include depositing a mask material over the pole material across the whole wafer. The methods can further include performing a first material removal process across the whole wafer to remove the mask material and a first portion of the pole material at a same material removal rate. The methods can further include performing a second material removal process to remove a second portion of the pole material above the substrate layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.