Method and system for providing a perpendicular magnetic recording pole using multiple chemical mechanical planarizations
US8262919B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2010 |
| Grant date | Sep 11, 2012 |
| Priority date | — |
| Expiry date | Mar 11, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/315
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method and system for providing a pole of magnetic transducer having an intermediate layer are described. The method and system include providing a trench in the intermediate layer and depositing a nonmagnetic liner. A portion of the nonmagnetic liner resides in the trench. At least one seed layer is deposited. A portion of the at least one seed layer resides in the trench. The method and system include depositing at least one main pole layer. The at least one main pole layer is magnetic. A portion of the main pole layer(s) reside in the trench. The method and system also include performing a first chemical mechanical planarization (CMP). An excess portion of the seed layer(s) external to the trench are removed through an ion beam etch. The method and system further include performing a second CMP to remove an excess portion of the nonmagnetic liner external to the trench.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.