Patent · US Active

Table guided by aerostatic bearing elements for vacuum application

US8267582B2 · kind B2 · utility

2Cited by

10References

10Claims

0Family size

Assignee

VISTEC ELECTRON BEAM GMBH · DE

Inventors

Gerhard Schubert · Jena, DE
Christian Jackel · Landsberg, DE
Ulf-Carsten Kirschstein · Jena, DE
Michael Boehm · Waukesha, US
René Bauer · Schweinfurt, DE
Gerd Harnisch · Jena, DE
Thomas Peschel · Jena, DE
Stefan Risse · Jena, DE
Christoph Schenk · Icking, DE

Key dates

Filing date	Apr 10, 2009
Grant date	Sep 18, 2012
Priority date	—
Expiry date	Oct 20, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/20221
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.