Link processing with high speed beam deflection
US8269137B2 · kind B2 · utility
19Cited by
26References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 18, 2008 |
| Grant date | Sep 18, 2012 |
| Priority date | — |
| Expiry date | Jun 18, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49156
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.