Patent · US Active

Nanotube processing employing solid-condensed-gas-layers

US8273257B2 · kind B2 · utility

1Cited by
16References
32Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 24, 2009
Grant dateSep 25, 2012
Priority date
Expiry dateNov 5, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/891
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

In a method for processing a nanotube, a vapor is condensed to a solid condensate layer on a surface of the nanotube and then at least one selected region of the condensate layer is locally removed by directing a beam of energy at the selected region. The nanotube can be processed with at least a portion of the solid condensate layer maintained on the nanotube surface and thereafter the solid condensate layer removed. Nanotube processing can include, e.g., depositing a material layer on an exposed nanotube surface region where the condensate layer was removed. After forming a solid condensate layer, an electron beam can be directed at a selected region along a nanotube length corresponding to a location for cutting the nanotube, to locally remove the condensate layer at the region, and an ion beam can be directed at the selected region to cut the nanotube at the selected region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.