Hardmask composition and associated methods
US8273519B2 · kind B2 · utility
2Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2007 |
| Grant date | Sep 25, 2012 |
| Priority date | — |
| Expiry date | Mar 25, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A hardmask composition includes a solvent and an organosilicon copolymer. The organosilicon copolymer may be represented by Formula A:(SiO1.5—Y—SiO1.5)x(R3SiO1.5)y (A)
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.