Flexibly deformable holding element for substrates

US8274640B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Gerhard Kalkowski · Jena, DE
• Stefan Risse · Jena, DE
• Thomas Peschel · Jena, DE
• Christoph Damm · Jena, DE

Key dates

• Filing date: Sep 23, 2009
• Grant date: Sep 25, 2012
• Expiry date: Apr 14, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/6831
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Flexibly deformable holding elements operate such that substrates can be held in a fixed manner at a surface of the holding element electrostatically or also by use of negative pressure and planar positional deviations or unwanted deformations can be compensated simply and reliably, where at least one cut-out having an opening arranged at the rear side is formed at the rear side of the holding element which is disposed opposite the surface, and an actuator is arranged there exerting compressive forces or pulling forces for a widening or narrowing of the cut-out and/or for a deformation of the holding element.