Optical beam control based on flexure actuation with positioning sensing and servo control
US8274724B2 · kind B2 · utility
1Cited by
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16Claims
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Key dates
| Filing date | Sep 23, 2011 |
| Grant date | Sep 25, 2012 |
| Priority date | — |
| Expiry date | Sep 23, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K41/0354
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Implementations of actuators that use flexures to provide support to actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure. A positioning sensor, such as a capacitor sensor, is provided to measure and monitor positioning of the actuator and is coupled to a feedback circuit which uses the measured positioning of the actuator to control the actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.