Device and method for introducing gas for analysis device
US8276470B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 10, 2008 |
| Grant date | Oct 2, 2012 |
| Priority date | — |
| Expiry date | Apr 6, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2446
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Gas is supplied from positive pressure (105 Pa or more) to an analysis device of high vacuum (10−2 Pa or less) precisely and stably, while keeping conditions constant and replicating the conditions, and performing switching to a desired gas within a short time. According to a gas introducing device and a method, a plurality of types of gases are synthesized in a mixing chamber, the synthesized gas is introduced and the pressure of the gas is reduced by a pressure reducing pump to a pressure ranging from 0.1 Pa to 0.1 MPa, and the depressurized gas is introduced to a gas analysis device through a switching operation using a gas switching valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.