Piezoelectric and CMUT layered ultrasound transducer array
US8277380B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 11, 2007 |
| Grant date | Oct 2, 2012 |
| Priority date | — |
| Expiry date | Feb 11, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S7/5208
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A CMUT or other semiconductor-based transducer is stacked with a piezoelectric transducer (PZT). The CMUT is sufficiently thin to avoid or limit interference with sound propagation through the CMUT from or to the PZT or crosstalk between transmitter elements. The PZT/CMUT layered structure is used as a matrix array, such as an array with a multi-dimensional arrangement of elements. The CMUT array is formed and thinned using semiconductor processing. The PZT transmits acoustic energy through the thin CMUT. The CMUT receives responsive echoes. Using integrated electronics in the thin wafer of the CMUT limits interconnection problems for the matrix receive array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.