Patent · US Active

Method and apparatus for fluid processing a workpiece

US8277624B2 · kind B2 · utility

1Cited by

68References

10Claims

0Family size

Assignee

TEL NEXX, INC. · US

Inventors

Arthur Keigler · Billerica, US
John Harrell · Paxton, US
Zhenqiu Liu · Marlborough, US
Qunwei Wu · Westford, US

Key dates

Filing date	Oct 17, 2011
Grant date	Oct 2, 2012
Priority date	—
Expiry date	Oct 17, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67126
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.