Nano imprinting method and apparatus
US8277717B2 · kind B2 · utility
1Cited by
0References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 23, 2009 |
| Grant date | Oct 2, 2012 |
| Priority date | — |
| Expiry date | Aug 18, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention relates to a nano imprint method and to a nano imprint apparatus comprising: a first imprint module, a second imprint module, a storage and a feeder module, wherein; the first imprint module is adapted to imprint a pattern into an intermediate polymer stamp from a template; a second imprint module is adapted to imprint a pattern into a substrate from the intermediate polymer stamp; robot feeder modules are adapted to move the template, intermediate polymer stamp and the substrate from and to storages.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.