Patent · US Active

Method of fabricating a thin film transistor substrate and a photosensitive composition used in the thin film transistor substrate

US8278021B2 · kind B2 · utility

1Cited by
17References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 10, 2008
Grant dateOct 2, 2012
Priority date
Expiry dateJan 30, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/60

Abstract

Disclosed is a method of producing a thin film transistor substrate having high light sensitivity, heat-resistance, impact resistance, and a photosensitive composition used by the same, the method including forming data wires on an insulating substrate, forming an organic insulating film on the data wires by applying a photosensitive composition comprising a terpolymer, where the terpolymer is derived from monomers of an unsaturated carboxylic acid, an unsaturated carboxylic acid anhydride, or a mixture thereof, an unsaturated epoxy group-containing compound, and an olefinic compound.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.