Patent · US Active

Apparatus for minimizing a heat affected zone during laser micro-machining

US8278590B2 · kind B2 · utility

5Cited by
12References
28Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 27, 2005
Grant dateOct 2, 2012
Priority date
Expiry dateJan 5, 2029

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB23K26/361
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

Embodiments of the present invention are directed to methods and systems for laser micro-machining, which may include dividing a long line illumination field into a plurality of individual fields, wherein each of the plurality of fields includes an aspect ratio of about 4:1 or greater, directing the plurality of individual fields onto at least one mask, wherein each individual field illuminates a corresponding area on the mask and translating the mask and/or workpiece relative to one another along a scan axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.