Encapsulation module method for production and use thereof

US8279615B2 · kind B2 · utility

Assignee

• Continental Teves AG & Co. OHG · DE

Inventors

• Bernhard Schmid · Friedberg, DE
• Roland Hilser · Kirchheim unter Teck, DE
• Heikki Kuisma · Helsinki, FI
• Altti Torkkeli · Tuusula, FI

Key dates

• Filing date: Dec 14, 2007
• Grant date: Oct 2, 2012
• Expiry date: Mar 9, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/1461
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method for producing an encapsulation module and/or for encapsulating a micromechanical arrangement, wherein electronic connection provisions are formed from a blank of electrically conductive semiconductor material, by one or more structuring processes and/or etching processes, wherein, in the course of forming the electronic connection provisions, a pedestal of the semiconductor material arises, on which the electronic connection provisions are arranged, wherein the latter are subsequently embedded with an embedding material and the embedding material and/or the semiconductor pedestal are removed after the embedding to an extent such that a defined number of the electronic connection provisions have electrical contacts on at least one of the outer surfaces of the encapsulation module thus produced, wherein upon forming the electronic connection provisions, on the pedestal of the semiconductor material, an insular material hump is formed, on which a plated-through hole is arranged in each case, and which embodies a semiconductor electrode.