Patent · US Active

Gas sensor

US8283704B2 · kind B2 · utility

3Cited by
0References
2Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 30, 2009
Grant dateOct 9, 2012
Priority date
Expiry dateAug 4, 2029

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N27/4148
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A gas sensor (30) includes two field-effect transistors and gate electrodes on gate insulation films (24) of the two field-effect transistors to detect gas using the gate electrodes. The gas sensor (30) includes a first gate electrode (5), a second gate electrode (6), and voltage applying means. The first gate electrode (5) is provided on one of the field-effect transistors. The second gate electrode (6) is provided on another one of the field-effect transistors. The voltage applying means is for, with the first gate electrode (5) and the second gate electrode (6) coupled to one another by wiring, applying thereto one of a direct-current voltage and an alternating-current voltage having a same potential or a constant voltage difference. The first gate electrode (5) and the second gate electrode (6) are made of different metals. The one field-effect transistor and the other field-effect transistor have approximately the same structures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.