Patent · US Active

Guided bulk acoustic wave device having reduced height and method for manufacturing

US8283835B2 · kind B2 · utility

10Cited by

4References

23Claims

0Family size

Assignee

EPCOS AG · DE

Inventors

Thomas Metzger · North Tonawanda, US
Christoph Eggs · Rattenkirchen, DE
Werner Ruile · Birkenfeld, DE

Key dates

Filing date	Apr 30, 2010
Grant date	Oct 9, 2012
Priority date	—
Expiry date	Nov 13, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/42
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Guided bulk acoustic wave devices and method for manufacturing guided bulk acoustic wave devices are provided. A guided bulk acoustic wave device includes a resonator structure with a piezoelectric layer, an electrode layer for exciting guided bulk acoustic waves and a wave guide layer. The thickness of the piezoelectric layer is less than or equal to 50 μm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.