Scanning probe in pulsed-force mode, digital and in real time

US8286261B2 · kind B2 · utility

Assignee

• Witec Wissenschaftliche Instrumente und Technologie GmbH · DE

Inventors

• Peter Spizig · Niederstotzingen, DE
• Detief Sanchen · Neu-Ulm, DE
• Jörg Förstner · Ulm, DE
• Joachim Koenen · Ulm, DE
• Othmar Marti · Ulm, DE
• Gerhard Volswinkler · Laupheim, DE

Key dates

• Filing date: Jul 14, 2010
• Grant date: Oct 9, 2012
• Expiry date: Jan 10, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/32
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A microscope, in particular a scanning probe microscope, comprising a programmable logic device.