Laser micro-machining system with post-scan lens deflection
US8288684B2 · kind B2 · utility
0Cited by
13References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2008 |
| Grant date | Oct 16, 2012 |
| Priority date | — |
| Expiry date | May 15, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/0026
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser micro-machining system includes a laser source positioned to direct a laser pulse through a scan lens to a work piece mounted on a work surface and a mirror positioned between the scan lens and the work piece and tilted with respect to the work surface to reflect the laser pulse toward the work piece. The mirror can be indexed to a number of positions so that only portions of the mirror are used for a number of processing steps, extending the life of the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.