Defect detection recipe definition
US8289508B2 · kind B2 · utility
13Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 2009 |
| Grant date | Oct 16, 2012 |
| Priority date | — |
| Expiry date | Jan 6, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of forming a device is disclosed. The method includes providing a substrate and processing a layer of the device on the substrate. The layer is inspected with an inspection tool for defects. The inspection tool is programmed with an inspection recipe determined from studying defects programmed into the layer at known locations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.