Method for measuring a spectrum of a narrowband light source, and spectrometer arrangement

US8289520B2 · kind B2 · utility

Assignee

• Carl Zeiss Laser Optics GmbH · DE

Inventors

• Johannes Kraus · Gerbrunn, DE
• Alois Herkommer · Aalen, DE
• Bernhard Weigl · Seattle, US
• Michel Le Maire · Oberkochen, DE
• Holger Muenz · Aalen, DE

Key dates

• Filing date: Sep 14, 2009
• Grant date: Oct 16, 2012
• Expiry date: Oct 16, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J3/36
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers ≧1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra—recorded by the at least one detector—of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.