Micro-mirror and micro-mirror array using the same
US8289612B2 · kind B2 · utility
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4References
26Claims
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Assignee
Inventors
Key dates
| Filing date | Oct 15, 2008 |
| Grant date | Oct 16, 2012 |
| Priority date | — |
| Expiry date | Aug 7, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed are a micro mirror and a micro mirror array using the same. The micro mirror includes: an insulation substrate; an address electrode formed on the insulation substrate; a charging unit electrically insulated from the address electrode; and a reflecting body rotatably provided on the insulation to reflect incident light and spaced apart from the address electrode and the charging unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.