Wafer stack, integrated optical device and method for fabricating the same
US8289635B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2008 |
| Grant date | Oct 16, 2012 |
| Priority date | — |
| Expiry date | Mar 14, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
Abstract
In a method for fabricating an integrated optical device by creating a wafer stack by stacking at least a top wafer carrying as functional elements a plurality of lenses on at least one further wafer including further functional elements, and separating the wafer stack into a plurality of integrated optical devices, wherein corresponding functional elements of the top and further wafer are aligned with each other and define a plurality of main optical axes, a method for providing a sunshade plate as part of an integrated optical device (10), including the steps of: providing a sunshade plate having a plurality of through holes, the through holes being arranged to correspond to the arrangement of the functional elements on the top wafer; and stacking the sunshade plate on the top wafer, with the through holes being aligned with said main optical axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.